SMART Pulser

SMART Pulser

Smart series High voltage pulse power supply is used as E-Gun pulser and pulse plasma power source as a high-precision DC power supply and high-speed semiconductor switch by using 1 ~ 10kHz square wave voltage output. It can be used as Gun pulse power such as small Klystron, Thyratron, Magnetron and for wafer plasma doping of semiconductor processes. It is best suited to synchronous Modulator power with smaller time jitter of the square wave output voltage. In addition, it supply a high reliability in quality of the pulse power with a strong protection function to protect the power supply and the semiconductor switch from spark generated by the load.

Specification

MODEL NAME SMT-PPT-XXXY
RATED PRESSURE capacity 15.6 [kVA]
voltage Three-phase 208, Single-phase 208[V]
frequency 60 [ Hz ]
RATED PRESSURE voltage 100~xx,000 [V]
current Y.Y [A] Max
voltage stability ± 0.1% of rated voltage
CONTROL FUNCTION Pulse voltage setting level 1 [V]
Frequency setting level 1 [ Hz ]
Output Pulse Width 1-150 [μ Sec]
Pulse Width about 1 [μS]
Pulse Rise time 500 [nS] Within
Pulse Fall time 500 [nS] Within
Display devices LCD
Communication Method RS-32
Operating modes Local /Remote
PROTECTIVE FUNCTION Protection Overcurrent, overvoltage, overtemperature
Cooling system Air Cooled
Load spark Spark protection circuit